Replication of sub-micrometre features using microsystems technology

Abstract

AbstractMany fields of industry are looking for growth from miniaturisation. Because competition is increasing, costs are becoming more important in mass production. These are the driving forces for improving and developing micro injection moulding and replication technologies. This experimental study was carried out to replicate sub-micrometre features using the micro injection moulding technique. For the experiments, polycarbonate (PC) was selected because of its flow properties. The effects of processing parameters on the replication properties were observed. The best replication results were achieved when a small injection piston diameter and large shot size were used in micro injection moulding.Keywords: MICRO INJECTION MOULDINGREPLICATIONSUB-MICROMETREPOLYCARBONATE