X-ray photoelectron spectroscopy analysis of zirconium nitride-like films prepared on Si(100) substrates by ion beam assisted deposition - Concepedia

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X-ray photoelectron spectroscopy analysis of zirconium nitride-like films prepared on Si(100) substrates by ion beam assisted deposition

77

Citations

31

References

2007

Year

Masaya Matsuoka, Sadao Isotani, W. Sucasaire, Naoto Kuratani, K. Ogata

Surface and Coatings Technology

Materials ScienceEngineeringSurface ScienceApplied PhysicsZirconium Nitride-like FilmsIon BeamChemical DepositionChemical Vapor DepositionThin Film Processing

References

	Year	Citations

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