Naoto Kuratani

X-ray photoelectron spectroscopy analysis of zirconium nitride-like films prepared on Si(100) substrates by ion beam assisted deposition

Masaya Matsuoka, Sadao Isotani, W. Sucasaire et al. · Surface and Coatings Technology · 2007 · 77 citations

Materials Science, Engineering, Surface Science +6

Influence of ion energy and arrival rate on x-ray crystallographic properties of thin ZrOx films prepared on Si(111) substrate by ion-beam assisted deposition

Masaya Matsuoka, Sadao Isotani, J.F.D. Chubaci et al. · Journal of Applied Physics · 2000 · 45 citations

Engineering, Preferred Orientation, Thin Zrox Films +16

Effects of ion energy and arrival rate on the composition of zirconium oxide films prepared by ion-beam assisted deposition

M. Matsuoka, Sadao Isotani, Shoji Miyake et al. · Journal of Applied Physics · 1996 · 43 citations

Materials Science, Arrival Rate, Engineering +15

X-Ray Photoelectron Spectroscopy and Raman Spectroscopy Studies on Thin Carbon Nitride Films Deposited by Reactive RF Magnetron Sputtering

Masao Matsuoka, Sadao Isotani, Ronaldo Domingues Mansano et al. · World Journal of Nano Science and Engineering · 2012 · 42 citations · Full text

Engineering, Cubic Boron Nitride, Graphite Target +20

Internal stress in thin films prepared by ion beam and vapor deposition

Naoto Kuratani, Osamu Imai, Akinori Ebe et al. · Surface and Coatings Technology · 1994 · 26 citations

Materials Science, Ion Implantation, Engineering +7