X-ray photoelectron spectroscopy analysis of zirconium nitride-like films prepared on Si(100) substrates by ion beam assisted deposition

Masaya Matsuoka, Sadao Isotani, W. Sucasaire, +2

Surface and Coatings Technology

Materials ScienceEngineeringSurface ScienceApplied PhysicsZirconium Nitride-like Films +4

Influence of ion energy and arrival rate on x-ray crystallographic properties of thin ZrOx films prepared on Si(111) substrate by ion-beam assisted deposition

Masaya Matsuoka, Sadao Isotani, J.F.D. Chubaci, +4

Journal of Applied Physics

EngineeringPreferred OrientationThin Zrox FilmsIon ImplantationThin Film Processing +14

Effects of ion energy and arrival rate on the composition of zirconium oxide films prepared by ion-beam assisted deposition

M. Matsuoka, Sadao Isotani, Shoji Miyake, +3

Journal of Applied Physics

Materials ScienceArrival RateEngineeringElectron BeamOxidation Resistance +13

X-Ray Photoelectron Spectroscopy and Raman Spectroscopy Studies on Thin Carbon Nitride Films Deposited by Reactive RF Magnetron Sputtering

Masao Matsuoka, Sadao Isotani, Ronaldo Domingues Mansano, +5

World Journal of Nano Science and Engineering

EngineeringCubic Boron NitrideGraphite TargetChemistryThin Carbon Nitride +18

Internal stress in thin films prepared by ion beam and vapor deposition

Naoto Kuratani, Osamu Imai, Akinori Ebe, +2

Surface and Coatings Technology

Materials ScienceIon ImplantationEngineeringApplied PhysicsIon Beam +5

The synthesis and properties of BN films prepared by ion irradiation and vapor deposition

Satoshi Nishiyama, Naoto Kuratani, Akinori Ebe, +1

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

Materials ScienceMaterials EngineeringBoron NitrideEngineeringBn Films +6

Boron nitride hard coatings by ion beam and vapor deposition

Satoshi Nishiyama, Eiji Takahashi, Yasuo Iwamoto, +3

Thin Solid Films

Materials ScienceBoron NitrideEngineeringHexagonal Boron NitrideSurface Science +4

Fundamental study of ion-irradiation effects on the columnar growth of chromium films prepared by ion-beam and vapor deposition

Naoto Kuratani, Akinori Ebe, Kiyoshi Ogata, +3

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Materials ScienceIon ImplantationCr Thin FilmsEngineeringSurface Science +11

Improvement of the adhesion to polyimide substrates of copper films prepared by an ion beam and vapor deposition (IVD) method

Akinori Ebe, Eiji Takahashi, Yasushi Iwamoto, +6

Thin Solid Films

Materials ScienceEngineeringSurface ScienceApplied PhysicsCopper Films +6

Effects of arrival rate and gas pressure on the chemical bonding and composition in titanium nitride films prepared on Si(100) substrates by ion beam and vapor deposition

M. Matsuoka, Sadao Isotani, J.C.R. Mittani, +3

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

EngineeringChemical DepositionSilicon On InsulatorChemical EngineeringThin Titanium +19