Step-controlled homoepitaxial growth of 4H–SiC on vicinal substrates - Concepedia

Concepedia

Publication | Open Access

Step-controlled homoepitaxial growth of 4H–SiC on vicinal substrates

DOI Full Paper Access

25

Citations

12

References

2013

Year

Birgit Kallinger, Patrick Berwian, Jochen Friedrich, Bernd Thomas

Journal of Crystal Growth

Materials ScienceMaterials EngineeringEngineeringApplied PhysicsEpitaxial GrowthStep-controlled Homoepitaxial GrowthCarbide

References

	Year	Citations

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