Performance of a new high-resolution electron energy-loss spectroscopy microscope

Masami Thrauchi, Ryuichi Kuzuo, F. Satoh, Michiyoshi Thnaka, K. Tsuno, Junichi Ohyama

Microscopy Microanalysis Microstructures · 1991 · 50 citations · 1 references

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Abstract

We have been developing a new instrument for high resolution electron energy-loss spectroscopy (EELS). It is composed of a JEM-1200EX transmission electron microscope -the basic component -and two Wien filters (a monochrometer and an analyzer) with retardation lenses and acceleration lenses. The stigmatic focus has been achieved by a special design of the Wien filter. A spatial resolution of 190nm, and a momentum resolution (203C0/03BB) of 0.069-1 have been obtained.

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