Performance of a new high-resolution electron energy-loss spectroscopy microscope

Abstract

We have been developing a new instrument for high resolution electron energy-loss spectroscopy (EELS). It is composed of a JEM-1200EX transmission electron microscope -the basic component -and two Wien filters (a monochrometer and an analyzer) with retardation lenses and acceleration lenses. The stigmatic focus has been achieved by a special design of the Wien filter. A spatial resolution of 190nm, and a momentum resolution (203C0/03BB) of 0.069-1 have been obtained.