Comparison of low temperature polysilicon crystal growth on low cost substrates

Abstract

We have investigated the growth of silicon polycrystals from deposited amorphous films on several different substrates. Using Raman spectroscopy, x-ray diffraction, transmission electron microscopy, and optical microscopy, we find that substrate choice affects crystallite size, preferential orientation, and growth rate. In addition, it is shown that large high quality crystals can be grown on low cost glasses.