Journal of Microelectromechanical Systems · 2012 · 45 citations · 18 references
Underwater Pressure VariationsEngineeringMechanical EngineeringSensor TechnologyFlexible SensorMechanicsSensor OperationInstrumentationUnderwater CommunicationWearable ElectronicsOptical SensorsBiomedical SensorsFlexible ElectronicsMicrofabricationSensorsFlexible SensorsSensor DesignUnderwater TechnologyUnderwater SensingFractional Resistance Change
This paper presents a flexible pressure sensor array which is demonstrated to transduce underwater pressure variations produced by moving objects and surface waves. The sensors exhibit a 0.0014 fractional resistance change per 100 Pa, achieving a high 1.5-Pa pressure resolution. The measurement has a repeatability of 22% of the peak amplitude of the pressure waveform, due to creep. Additionally, sensor operation while bent to a 0.5-m radius of curvature is demonstrated. Each sensor consists of a strain-concentrating polydimethylsiloxane (PDMS) diaphragm and a resistive strain gauge made of a conductive carbon-black–PDMS composite. A 1-D array of four sensors with a 15-mm center-to-center spacing is fabricated, and the dynamic response of the sensors is characterized and modeled. <formula formulatype="inline" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><tex Notation="TeX">$\hfill$</tex></formula> [2011-0333]
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