Publication | Closed Access
Control of substrate surface temperature in millisecond annealing technique using thermal plasma jet
18
Citations
7
References
2007
Year
EngineeringMicrofabricationThermal Plasma JetSurface ScienceApplied PhysicsPlasma EtchingHeat TransferPlasma ApplicationThermal EngineeringSurface ProcessingPlasma ProcessingMillisecond Annealing TechniqueSubstrate Surface Temperature
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