Thin Solid Films · 1997 · 31 citations · 10 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor MaterialsThin FilmsSemiconductor NanomaterialsSemiconductor Thin FilmsSilicon MaterialsThin Film Electrical PropertiesThin-film DepositionThin-film MaterialsSilicon Thin Films
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Characterization of plasma-deposited microcrystalline silicon
Y. Mishima, Seiichi Miyazaki, M. Hirose et al. · Philosophical Magazine B · 1982 · 99 citations