Atomic transport during growth of ultrathin dielectrics on silicon

General Relationship for the Thermal Oxidation of Silicon

B. E. Deal, Andrew S. Grove · Journal of Applied Physics · 1965 · 3.4K citations

Natural Sciences, Chemistry, Materials Science +17

Theory of the oxidation of metals

N. Cabrera, N. F. Mott · Reports on Progress in Physics · 1949 · 2.9K citations

Natural Sciences, Chemistry, Materials Science +10

Microanalysis by the direct observation of nuclear reactions using a 2 MeV Van de Graaff

G. Amsel, J. P. Nadai, E. d'Artemare et al. · Nuclear Instruments and Methods · 1971 · 442 citations

Natural Sciences, Physics, Nuclear Physics +6

The silicon-silicon dioxide system: Its microstructure and imperfections

C. R. Helms, Edward H. Poindexter · Reports on Progress in Physics · 1994 · 409 citations

Natural Sciences, Materials Science, Physics +17

Reduction of hot electron degradation in metal oxide semiconductor transistors by deuterium processing

Joseph W. Lyding, K. Hess, I.C. Kizilyalli · Applied Physics Letters · 1996 · 363 citations

Engineering, Materials Engineering, Materials Science +16