Publication | Closed Access
Topographical and Chemical Microanalysis of Surfaces with a Scanning Probe Microscope and Laser-Induced Breakdown Spectroscopy
56
Citations
7
References
2000
Year
Probe MicroscopeEngineeringMicroscopyLaser AblationEducationChemical MicroanalysisSpectrochemical AnalysisEarth ScienceLaser-induced Breakdown SpectroscopyMicroscopy MethodChemical ImageLaser-based SensorLaser-surface InteractionsInstrumentationNitrogen LaserChemical ImagingMaterials ScienceMicroanalysisMicrofabricationLaser-induced BreakdownSpectroscopySurface ScienceApplied PhysicsScanning Probe MicroscopySurface AnalysisSurface Topography
Spatially resolved chemical imaging is achieved by combining a fiber-optic scanning probe microscope with laser-induced breakdown spectroscopy in a single instrument, TOPOLIBS. Elemental composition of surfaces can be mapped and correlated with topographical data. The experiment is conducted in air with minimal sample preparation. In a typical experiment, surface topography is analyzed by scanning a sharp fiber-optic probe across the sample using shear force feedback. The probe is then positioned over a feature of interest and pulsed radiation is delivered to the surface using a nitrogen laser. The pulse vaporizes material from the surface and generates a localized plasma plume. Optical emission from the plume is analyzed with a compact UV/visible spectrometer. Ablation crater size is controlled by the amount of laser power coupled into the probe. Sampling areas with submicrometer dimensions are achieved by using reduced laser power.
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