Study of anisotropic etching of (1 0 0) Si with ultrasonic agitation - Concepedia

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Study of anisotropic etching of (1 0 0) Si with ultrasonic agitation

59

Citations

12

References

2002

Year

Jing Chen, Litian Liu, Zhijian Li, Zhimin Tan, Q. Jiang, Huajun Fang, Yang Xu, Yanxiang Liu

Sensors and Actuators A Physical

Materials ScienceMaterials EngineeringEngineeringMicrofabricationSurface ScienceApplied PhysicsUltrasonic AgitationSemiconductor Device FabricationUltrasoundSilicon On InsulatorPlasma EtchingNanolithography MethodMicromachined Ultrasonic TransducerAnisotropic Etching

References

	Year	Citations

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