91
Publications
2.7K
Citations
30
H-Index
2002
Active since
Yanxiang Liu is an author at Shanghai Institute of Microsystem and Information Technology specializing in engineering, chemistry, and materials science.
Top concepts
EngineeringChemistryMaterial ScienceChemical EngineeringHealthPhotochemistryPhotocatalysisCatalysisFood ChemistryPhotoelectrocatalysis
Publications per year
2002–2024
91
91
EUV Lithography: State-of-the-Art Review
Nan Fu, Yanxiang Liu, Xiaolong Ma et al. · Journal of Microelectronic Manufacturing · 2019 · 92 citations · Full text
Rows per page
1–5 of 91