Statistics
Publications
91
Citations
2.7K
H-Index
30
Active since
2002
Yanxiang Liu is an author at Shanghai Institute of Microsystem and Information Technology specializing in engineering, chemistry, and materials science.
Publications per year
2002–2024
91
91
EUV Lithography: State-of-the-Art Review
Nan Fu, Yanxiang Liu, Xiaolong Ma et al. · Journal of Microelectronic Manufacturing · 2019 · 92 citations · Full text
1–5 of 91