Statistics
Publications
95
Citations
2.9K
H-Index
31
Active since
2002
Yanxiang Liu is an author at Shanghai Institute of Microsystem and Information Technology specializing in materials science, natural sciences, and engineering.
Publications per year
2002–2024
95
95
EUV Lithography: State-of-the-Art Review
Nan Fu, Yanxiang Liu, Xiaolong Ma et al. · Journal of Microelectronic Manufacturing · 2019 · 101 citations · Full text
1–5 of 95