Journal of Microelectronic Manufacturing

EUV Lithography: State-of-the-Art Review

Nan Fu, Yanxiang Liu, Xiaolong Ma et al. · 2019 · 101 citations · Full text

Engineering, Materials Engineering, Materials Science +12

Recent Advances in Organic-inorganic Hybrid Photoresists

Zhihao Wang, Xindi Yao, Huiwen An et al. · 2021 · 18 citations · Full text

Natural Sciences, Chemistry, Materials Science +13

Generative Learning in VLSI Design for Manufacturability: Current Status and Future Directions

Mohamed Baker Alawieh, Yibo Lin, Wei Ye et al. · 2019 · 15 citations · Full text

Engineering, Computer Engineering, Electrical Engineering +17

A Photolithography Process Design for 5 nm Logic Process Flow

Qiang Wu, Yanli Li, Yushu Yang et al. · 2019 · 15 citations · Full text

Engineering, Computer Engineering, Electrical Engineering +14

Metrology Challenges in 3D NAND Flash Technical Development and Manufacturing

Wei Zhang, Jun Xu, Sicong Wang et al. · 2019 · 10 citations · Full text

Engineering, Manufacturing Engineering, Materials Science +15