Journal of Materials Science Letters · 2001 · 17 citations · 3 references
EngineeringManufacturing EngineeringMaterials EngineeringManufacturing ProcessesMicroelectromechanical SystemsMicrofabricationInjection MoldingMems FabricationMicrofabrication ProcessesMicromachiningMicrostructure ControlPowder ProcessingInjection Molding TechniqueMicroelectromechanical System FabricationMicroreactor TechnologyMicroscale FabricationMicrostructure Fabrication
3
Development of ceramic microstructures
H.‐J. Ritzhaupt‐Kleissl, Werner Bauer, E. Günther et al. · Microsystem Technologies · 1996 · 25 citations
Natural Sciences, Materials Engineering, Materials Science +11