Polysilicon thin film piezoresistive pressure microsensor: design, fabrication and characterization

Piezoresistance Effect in Germanium and Silicon

Charles S. Smith · Physical Review · 1954 · 2K citations

Natural Sciences, Materials Science, Physics +10

Review: Semiconductor Piezoresistance for Microsystems

A.A. Barlian, Woo‐Tae Park, Joseph R. Mallon et al. · Proceedings of the IEEE · 2009 · 932 citations · Full text

Engineering, Materials Engineering, Materials Science +17

A graphical representation of the piezoresistance coefficients in silicon

Yozo Kanda · IEEE Transactions on Electron Devices · 1982 · 897 citations

Natural Sciences, Materials Engineering, Materials Science +10

Micromachined pressure sensors: review and recent developments

William P. Eaton, James H. Smith · Smart Materials and Structures · 1997 · 583 citations · Full text

Engineering, Materials Science, Mechanical Engineering +17

Piezoresistancc effect in germanium and silicon

Charlie Smith · Physical Review D · 1954 · 497 citations

Engineering, Materials Engineering, Materials Science +11