Concepedia

Oxygen plasma etching of diamond-like carbon coated mold-die for micro-texturing

Tatsuhiko Aizawa, Tatsuya Fukuda

Surface and Coatings Technology · 2012 · 38 citations · 2 references

DOI

Concepts

References

2

Inductively coupled RF oxygen plasma characterization by optical emission spectroscopy

Uroš Cvelbar, Nikša Krstulović, Slobodan Milošević et al. · Vacuum · 2007 · 79 citations

, , +10

Carbon reactivity in an oxygen plasma: a comparison with reactivity in molecular oxygen

Ana Cuesta, A. Martı́nez-Alonso, J.M.D. Tascón · Carbon · 2001 · 32 citations

, , +11