Concepedia

Inductively coupled RF oxygen plasma characterization by optical emission spectroscopy

Uroš Cvelbar, Nikša Krstulović, Slobodan Milošević, Miran Mozetič

Vacuum · 2007 · 79 citations · 11 references

DOI

Concepts

References

11

Plasma sterilization. Methods and mechanisms

Michel Moisan, Jean Barbeau, Marie-Charlotte Crevier et al. · Pure and Applied Chemistry · 2002 · 611 citations · Full text

, , +13

Handbook of thin film process technology

W Steckelmacher · Vacuum · 1996 · 285 citations

, , +12

Low-frequency, high-density, inductively coupled plasma sources: Operation and applications

Shuyan Xu, Kostya Ostrikov, Y Li et al. · Physics of Plasmas · 2001 · 204 citations · Full text

, , +15

Determination of atomic oxygen density with a nickel catalytic probe

Iztok Šorli, Rudolf Ročak · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2000 · 64 citations

, , +12

Oxidation of AISI 304L stainless steel surface with atomic oxygen

Alenka Vesel, Miran Mozetič, A. Zalar · Applied Surface Science · 2002 · 61 citations

, , +16