Concepedia

Publication | Closed Access

Real time analysis of amorphous and microcrystalline silicon film growth by multichannel ellipsometry

DOI

45

Citations

15

References

2000

Year

R. W. Collins, Joohyun Koh, André S. Ferlauto, P. I. Rovira, Yeeheng Lee, R.J. Koval, C. R. Wroński
Thin Solid Films

References

YearCitations

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