Metals and Materials International · 2005 · 11 citations · 9 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsSurface ScienceThin FilmsAtomic Layer DepositionLaser Surface ProcessingLaser-plasma InteractionsThin Film Electrical PropertiesThin-film DepositionThin-film MaterialsElectrical PropertiesElectrical Properties AnalysisLaser Surface TreatmentPlasma-enhanced Atomic Layer DepositionPlasma-enhanced DepositionThin Oxide FilmsThin-film Oxides
9
A. Shultz, Winyann Jang, W. M. Hetherington et al. · Surface Science · 1995 · 144 citations
Natural Sciences, Materials Engineering, Materials Science +17