Temperature dependence of the crystallite size and crystalline fraction of microcrystalline silicon deposited from silane by plasma CVD

X-ray diffraction procedures

Harold P. Klug, Leroy Alexander · CERN Document Server (European Organization for Nuclear Research) · 1954 · 4.2K citations

Materials Science, Engineering, Microscopy +6

The Effect of Cold-Work Distortion on X-Ray Patterns

Β. E. Warren, B. L. Averbach · Journal of Applied Physics · 1950 · 1.4K citations

X-ray Spectroscopy, Engineering, Microscopy +20

Formation kinetics and control of microcrystallite in μc-Si:H from glow discharge plasma

Akihisa Matsuda · Journal of Non-Crystalline Solids · 1983 · 646 citations

Materials Science, Engineering, Microfabrication +7

The preparation of thin layers of Ge and Si by chemical hydrogen plasma transport

S. Vepřek, V. Mareček · Solid-State Electronics · 1968 · 283 citations

Materials Science, Thin Layers, Engineering +8

Hydrogen chemical potential and structure of<i>a</i>-Si:H

R. A. Street · Physical review. B, Condensed matter · 1991 · 143 citations

Engineering, Silicon Network, Chemistry +16