Deposition of tantalum nitride thin films by D.C. magnetron sputtering

Reactive sputter deposition and properties of TaxN thin films

Tommi Riekkinen, J. M. Molarius, Tomi Laurila et al. · Microelectronic Engineering · 2002 · 159 citations

Natural Sciences, Materials Engineering, Materials Science +14

Multilayer, multicomponent, and multiphase physical vapor deposition coatings for enhanced performance

William D. Sproul · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1994 · 124 citations

Natural Sciences, Materials Engineering, Materials Science +17

Epitaxial growth of metastable δ-TaN layers on MgO(001) using low-energy, high-flux ion irradiation during ultrahigh vacuum reactive magnetron sputtering

Cheung Soo Shin, Y.-W. Kim, Niklas Hellgren et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2002 · 46 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +13

Deposition of NbN thin films by DC magnetron sputtering process

S.K. Kim, Jae Sung Yoo · Surface and Coatings Technology · 2003 · 33 citations

Natural Sciences, Materials Engineering, Materials Science +11

Oxidation kinetics of TiN layers: Exposed and beneath Pt thin films

Paul C. McIntyre, Scott R. Summerfelt, C.J. Maggiore · Applied Physics Letters · 1997 · 27 citations

Natural Sciences, Materials Engineering, Materials Science +17