Effects of grain size and plasma-induced modification of the dielectric on the mobility and stability of bottom gate microcrystalline silicon TFTs

Samir Kasouit, P. Roca i Cabarrocas, R. Vanderhaghen, Yvan Bonnassieux, M. Elyaakoubi, I. D. French

Journal of Non-Crystalline Solids · 2004 · 18 citations · 10 references

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