Journal of Non-Crystalline Solids · 2004 · 18 citations · 10 references
EngineeringElectrical EngineeringMaterials ScienceElectronic MaterialsMicroelectronicsSemiconductor DevicesDielectricsGrain GrowthNanoscale MaterialsSemiconductor Device MaterialsSemiconductor PhysicsSilicon MaterialsGate Dielectric EngineeringGate DielectricsGate Oxide Thickness EffectsPlasma-induced DamagePlasma-induced Surface DamageSiliconSilicon Electrical Properties
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