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Roughness analysis of optical films and substrates by atomic force microscopy

Materials ScienceAtomic Force MicroscopyOptical FilmsEngineeringMicroscopyOptical PropertiesMicrofabricationSurface ScienceApplied PhysicsScanning Force MicroscopyScanning Probe MicroscopyRoughness AnalysisNanometrologyThin FilmsNanotribology