IEEE Transactions on Electron Devices · 1979 · 107 citations · 8 references
Implantable DeviceEngineeringImplantable SensorMicrofabricationIndwelling Pressure TransducersMechanical EngineeringBioelectronicsMicromachined Ultrasonic TransducerTransducer PrincipleMiniature Pressure TransducerBiomedical EngineeringBiomedical Implant ApplicationsUltrasoundImplantable DevicesMicrofluidicsResistive Bridge
Miniature absolute pressure transducers are needed for biomedical implant applications. The design parameters are: 1) sensitivity, 2) size, 3) hysteresis, 4) temperature coefficient, 5) long-term stability, and 6) biocompatibility. The present devices cannot meet all the requirements, particularly in size, long-term stability, and biocompatibility. The results of a development program on implantable and indwelling pressure transducers are reported with emphasis on the study of long-term stability and reproducibility associated with reduced size. The sensor is a resistive bridge diffused on a
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Field Assisted Glass-Metal Sealing
George Wallis, D. Pomerantz · Journal of Applied Physics · 1969 · 726 citations