Publication | Closed Access
Growth of cubic boron nitride films by hot filament assisted RF plasma CVD
11
Citations
11
References
1994
Year
Materials ScienceCubic BoronBoron NitrideEngineeringHot FilamentHexagonal Boron NitrideCubic Boron NitrideApplied PhysicsRf Plasma CvdThin FilmsPlasma Processing
| Year | Citations | |
|---|---|---|
Page 1
Page 1