A direct-write, resistless hard mask for rapid nanoscale patterning of diamond

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Natural Sciences, Materials Engineering, Materials Science +14

Diamond for bio-sensor applications

Journal of Physics D Applied Physics · 2007 · 248 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Smooth and high-rate reactive ion etching of diamond

Yoshiki Nishibayashi, Koji Kobashi, Takashi Hirao et al. · Diamond and Related Materials · 2002 · 137 citations · Full text

Engineering, Materials Engineering, Materials Science +8

Ultrananocrystalline and Nanocrystalline Diamond Thin Films for MEMS/NEMS Applications

Anirudha V. Sumant, Orlando Auciello, Robert W. Carpick et al. · MRS Bulletin · 2010 · 129 citations

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The fabrication of silicon nanostructures by local gallium implantation and cryogenic deep reactive ion etching

Nikolai Chekurov, Kestutis Grigoras, Antti Peltonen et al. · Nanotechnology · 2009 · 105 citations

Engineering, Materials Engineering, Materials Science +17