Kestutis Grigoras

The fabrication of silicon nanostructures by local gallium implantation and cryogenic deep reactive ion etching

Nikolai Chekurov, Kestutis Grigoras, Antti Peltonen et al. · Nanotechnology · 2009 · 105 citations

Engineering, Materials Engineering, Materials Science +17

Conformal titanium nitride in a porous silicon matrix: A nanomaterial for in-chip supercapacitors

Kestutis Grigoras, Jari Keskinen, Leif Grönberg et al. · Nano Energy · 2016 · 100 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Review Article: Recommended reading list of early publications on atomic layer deposition—Outcome of the “Virtual Project on the History of ALD”

Esko Ahvenniemi, Andrew R. Akbashev, Saima Ali et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2016 · 95 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +13

Poly(dimethylsiloxane) electrospray devices fabricated with diamond-like carbon–poly(dimethylsiloxane) coated SU-8 masters

Katri Huikko, Pekka Östman, Kestutis Grigoras et al. · Lab on a Chip · 2003 · 86 citations

Engineering, Materials Engineering, Materials Science +12

Transmon qubit readout fidelity at the threshold for quantum error correction without a quantum-limited amplifier

Liangyu Chen, Hang-Xi Li, Yong Lu et al. · npj Quantum Information · 2023 · 77 citations · Full text

Computing, Electrical Engineering, Physics +17