Concepedia

Microwave plasma oxidation of silicon

Chen Fu, J. C. Mikkelsen, J.J. Schmitt, John R. Abelson, J. C. Knights, N. M. Johnson, Anthony Barker, M. J. Thompson

Journal of Electronic Materials · 1985 · 15 citations · 21 references

DOI

Concepts

References

21

Formation of stacking faults and enhanced diffusion in the oxidation of silicon

S. M. Hu · Journal of Applied Physics · 1974 · 435 citations

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An 18O study of the thermal oxidation of silicon in oxygen

E. Rosencher, A. Straboni, S. Rigo et al. · Applied Physics Letters · 1979 · 162 citations

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Defects in silicon substrates

S. M. Hu · Journal of Vacuum Science and Technology · 1977 · 159 citations

, , +17

Silicon Oxidation in an Oxygen Plasma Excited by Microwaves

J. R. Ligenza · Journal of Applied Physics · 1965 · 141 citations

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The Growth of Oxidation Stacking Faults and the Point Defect Generation at Si ‐ SiO Interface during Thermal Oxidation of Silicon

Ann Lin, R.W. Dutton, D.A. Antoniadis et al. · Journal of The Electrochemical Society · 1981 · 112 citations · Full text

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