Silicon pressure transducer arrays for blood-pressure measurement

Field Assisted Glass-Metal Sealing

George Wallis, D. Pomerantz · Journal of Applied Physics · 1969 · 730 citations

Natural Sciences, Materials Engineering, Materials Science +7

A Transducer for the Continuous External Measurement of Arterial Blood Pressure

G. L. Pressman, P. M. Newgard · IRE Transactions on Bio-Medical Electronics · 1963 · 172 citations

Engineering, Biomedical Engineering, Physiology +17

Fabrication of three-dimensional silicon structures by means of doping-selective etching (DSE)

Y. Lindén, L Tenerz, J Tirén et al. · Sensors and Actuators · 1989 · 43 citations

Engineering, Materials Engineering, Materials Science +14

A Novel Four-Electrode Electrochemica Etch-Stop Method for Silicon Membrane Formation

B. Kloeck, Ν. F. de Rooij · Infoscience (Ecole Polytechnique Fédérale de Lausanne) · 1987 · 10 citations

Engineering, Chemical Engineering, Chemistry +14