Concepedia

Publication | Closed Access

Channeling effect for low energy ion implantation in Si

DOI

65

Citations

4

References

1985

Year

K. Cho, W. R. Allen, T. G. Finstad, W. K. Chu, J. Liu, J. J. Wortman
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

References

YearCitations

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