Investigation on Bistability and Fabrication of Bistable Prestressed Curved Beam

Abstract

We investigated the bistability of bistable prestressed curved beam based on the theory of Euler buckling and the principle of the least energy. The bistability was found to be much affected by the ratio of the initial apex to the thickness of the curved beam. Using a standard silicon process, we fabricated curved beams made of single crystal Si. Voltage was then applied to the fabricated curved beams to generate capacitive electrostatic actuation force. The snap-through was confirmed in the range of 20 to 30 V apply voltage.