Hysteresis-free reactive high power impulse magnetron sputtering

Fundamental understanding and modeling of reactive sputtering processes

S. Berg, Tomas Nyberg · Thin Solid Films · 2005 · 699 citations

Engineering, Materials Engineering, Materials Science +10

Control of reactive sputtering processes

W.D. Sproul, D.J. Christie, D.C. Carter · Thin Solid Films · 2005 · 395 citations

Engineering, Manufacturing Engineering, Materials Processing +5

High power pulsed magnetron sputtered CrN films

Arutiun P. Ehiasarian, W.‐D. Münz, Lars Hultman et al. · Surface and Coatings Technology · 2002 · 272 citations

Natural Sciences, Materials Engineering, Materials Science +8

On the deposition rate in a high power pulsed magnetron sputtering discharge

Jones Alami, Kostas Sarakinos, G. Mark et al. · Applied Physics Letters · 2006 · 164 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +13

Titanium oxide thin films deposited by high-power impulse magnetron sputtering

Stéphanos Konstantinidis, J. P. Dauchot, M. Hecq · Thin Solid Films · 2006 · 155 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +12