Ionic-Liquid Lubrication of Sliding MEMS Contacts: Comparison of AFM Liquid Cell and Device-Level Tests

Abstract

Lubrication of microelectromechanical systems (MEMS) became very critical as the devices became complex and its reliability began to deteriorate. In this paper, ionic liquids (ILs) with low volatility and high environmental stability were investigated as lubricants for sliding MEMS devices. A method that is based on atomic force microscopy (AFM) with a liquid cell was developed to study friction and wear properties of surfaces lubricated with ILs, having a systematic variation in molecular geometry and chemistry. Six-member pyridinium and five-member imidazolium rings are compared as cations in ethyl methyl pyridinium and ethyl methyl imidazolium ethyl sulfate; influence of short and long alkyl chain lengths on lubrication is studied with butyl methyl pyrrolidinium and hexyl methyl pyrrolidinium bis(trifluro methyl sulfonyl) imide. Formation of a surface-screening cation layer was discovered and linked to low friction and wear of IL-lubricated hydrogenated-silicon (H-Si) substrates. Several promising IL lubricants were identified from the AFM study and were tested in real MEMS motor devices. The friction and wear data obtained for these tests showed good correlation with the failure life span of lubricated MEMS motors. This supports a conclusion that the AFM-liquid-cell technique can be used in screening IL lubricants for MEMS devices.