Textures and structures of vapor deposits

Mechanical properties of thin films

William D. Nix · Metallurgical Transactions A · 1989 · 2.5K citations

Materials Science, Engineering, Mechanical Engineering +6

Influence of apparatus geometry and deposition conditions on the structure and topography of thick sputtered coatings

John A. Thornton · Journal of Vacuum Science and Technology · 1974 · 2.3K citations

Engineering, Apparatus Geometry, Deposition Conditions +16

Thin Film Phenomena

K. L. Chopra, Julius Klerrer · Journal of The Electrochemical Society · 1970 · 2K citations

Thin Film Physics, Engineering, Physics +12

Reactive-sputter-deposited TiN films on glass substrates

Joshua Pelleg, Levy Zevin, S. Lungo et al. · Thin Solid Films · 1991 · 736 citations

Materials Science, Materials Engineering, Engineering +6

Effects of strain energy on the preferred orientation of TiN thin films

U Oh, Jung Ho Je · Journal of Applied Physics · 1993 · 400 citations · Full text

Materials Science, Materials Engineering, Material Analysis +14