Ion beam lithography for direct patterning of high accuracy large area X-ray elements in gold on membranes

Achim Nadzeyka, Lloyd Peto, S. Bauerdick, Marcel Mayer, Kahraman Keskinbora, Corinne Grévent, Markus Weigand, Michael Hirscher, Gisela Schütz

Microelectronic Engineering · 2012 · 21 citations · 6 references

Concepts

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