Marcel Mayer

Multilayer Fresnel zone plate for soft X-ray microscopy resolves sub-39 nm structures

Marcel Mayer, Corinne Grévent, Adriana Szeghalmi et al. · Ultramicroscopy · 2011 · 39 citations

X-ray Crystallography, Materials Science, Sub-39 Nm Structures +10

Efficient focusing of 8 keV X-rays with multilayer Fresnel zone plates fabricated by atomic layer deposition and focused ion beam milling

Marcel Mayer, Kahraman Keskinbora, Corinne Grévent et al. · Journal of Synchrotron Radiation · 2013 · 28 citations · Full text

Engineering, Electron-beam Lithography, Microscopy +19

Multilayer Fresnel zone plates for high energy radiation resolve 21 nm features at 12 keV

Kahraman Keskinbora, Anna-Lena Robisch, Marcel Mayer et al. · Optics Express · 2014 · 24 citations · Full text

Optical Materials, X-ray Spectroscopy, Engineering +21

Ion beam lithography for direct patterning of high accuracy large area X-ray elements in gold on membranes

Achim Nadzeyka, Lloyd Peto, S. Bauerdick et al. · Microelectronic Engineering · 2012 · 21 citations

Materials Science, Direct Patterning, Ion Beam Lithography +11