Concepedia

Focused Ion Beam Microscopy and Micromachining

Cynthia A. Volkert, Alexander Minor

MRS Bulletin · 2007 · 640 citations · 29 references

DOIFull text

Open access

Concepts

References

29

Conduction of heat in solids

C. J. Tranter · Journal of the Mechanics and Physics of Solids · 1959 · 18.5K citations

, , +10

Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets

Peter Sigmund · Physical Review · 1969 · 3.5K citations

, , +13

Size effects in the deformation of sub-micron Au columns

Cynthia A. Volkert, Erica T. Lilleodden · The Philosophical Magazine A Journal of Theoretical Experimental and Applied Physics · 2006 · 715 citations · Full text

, , +17

Field Ion Microscopy, Principles and Applications

Peter H. Bartels, Erwin W. Müller, Tien T. Tsong · Transactions of the American Microscopical Society · 1970 · 617 citations

, , +5

Focused ion beam technology and applications

J. Melngailis · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1987 · 611 citations

, , +11