InGaN-Based Near-Ultraviolet and Blue-Light-Emitting Diodes with High External Quantum Efficiency Using a Patterned Sapphire Substrate and a Mesh Electrode

Abstract

We markedly improved the extraction efficiency of emission light from the InGaN-based light-emitting diode (LED) chips grown on sapphire substrates. Two new techniques were adopted in the fabrication of these LEDs. One is to grow nitride films on the patterned sapphire substrate (PSS) in order to scatter emission light. Another is to use the Rh mesh electrode for p-GaN contact instead of Ni/Au translucent electrode in order to reduce the optical absorption by the p-contact electrode. We fabricated near-ultraviolet (n-UV) and blue LEDs using the above-mentioned techniques. When the n-UV (400 nm) LED was operated at a forward current of 20 mA at room temperature, the output power and the external quantum efficiency were estimated to be 22.0 mW and 35.5%, respectively. When the blue (460 nm) LED was operated at a forward current of 20 mA at room temperature, the output power and the external quantum efficiency were estimated to be 18.8 mW and 34.9%, respectively.