Low-temperature growth and orientational control in RuO2 thin films by metal-organic chemical vapor deposition

Chemical Vapor Deposition of Ruthenium and Ruthenium Dioxide Films

M. L. Green, M. E. Gross, Letizia Papa et al. · Journal of The Electrochemical Society · 1985 · 233 citations

Materials Science, Material Analysis, Engineering +12

Geometry of thin-film morphology

R. Messier, J. E. Yehoda · Journal of Applied Physics · 1985 · 223 citations

Materials Science, Materials Engineering, Thin-film Morphology +15

Barrier layers: Principles and applications in microelectronics

M. Wittmer · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1984 · 202 citations

Engineering, Integrated Circuits, Silicon On Insulator +18

Mechanism of Fatigue in Ferroelectric Thin Films

In Kyeong Yoo, Seshu B. Desu · physica status solidi (a) · 1992 · 179 citations

Engineering, Fatigue Model, Ferroelectric Thin Films +17

Model for Columnar Microstructure of Thin Solid Films

Seth Lichter, Jyhmin Chen · Physical Review Letters · 1986 · 170 citations

Materials Science, Column Orientation, Engineering +14