Concepedia
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 2011 · 12 citations · 8 references
EngineeringMaterials EngineeringMaterials ScienceMicrofabricationPolymer EngineeringMicrofabrication ProcessesSoft LithographyFocused Ion Beam LithographyFocused Ion Beam MachiningMaster Mold FabricationMold FabricationSoft Lithographic Device Fabrication
8
Formation of droplets and bubbles in a microfluidic T-junction—scaling and mechanism of break-up
Piotr Garstecki, Michael J. Fuerstman, Howard A. Stone et al. · Lab on a Chip · 2006 · 2.3K citations
Engineering, Chemical Engineering, Fluid Dynamics +16
Ion-beam modification of polymeric materials – fundamental principles and applications
Eal H. Lee · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1999 · 403 citations
Natural Sciences, Materials Engineering, Materials Science +14
Handbook of Semiconductor Manufacturing Technology
M. Henini · Microelectronics Journal · 2001 · 312 citations
Engineering, Manufacturing Engineering, Manufacturing Processes +11
Ion beam exposure characteristics of resists: Experimental results
Thomas M. Hall, Alfred Wagner, L. F. Thompson · Journal of Applied Physics · 1982 · 103 citations
Natural Sciences, Materials Engineering, Materials Science +17
Ion Beam Induced Crosslinking Reactions in Poly(di-<i>n</i>-hexylsilane)
Shu Seki, Kensaku Maeda, Yoshihisa Kunimi et al. · The Journal of Physical Chemistry B · 1999 · 54 citations
Natural Sciences, Materials Science, Physics +17