Deep SiC etching with RIE

Inductively coupled plasma etching of SiC in SF6/O2 and etch-induced surface chemical bonding modifications

Liudi Jiang, Rebecca Cheung, R. Brown et al. · Journal of Applied Physics · 2003 · 91 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Deep etching of silicon carbide for micromachining applications: Etch rates and etch mechanisms

Pascal Chabert · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2001 · 71 citations

Engineering, Materials Engineering, Materials Science +13

ICP etching of SiC

J. J. Wang, E. S. Lambers, S. J. Pearton et al. · Solid-State Electronics · 1998 · 54 citations

Engineering, Materials Engineering, Materials Science +11

Reactive ion etching of novel materials—GaN and SiC

A. Szczęsny, P. Śniecikowski, J. Szmidt et al. · Vacuum · 2003 · 39 citations

Engineering, Materials Engineering, Materials Science +14