Concepedia

Publication | Open Access

Deep SiC etching with RIE

DOIFull Paper Access

45

Citations

4

References

2006

Year

M. Lazar, Heu Vang, Pierre Brosselard, Christophe Raynaud, Pierre Crémillieu, Jean‐Louis Leclercq, A. Descamps, Sigo Scharnholz, D. Planson
Superlattices and Microstructures

References

YearCitations

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