Direct fabrication of microstructures on metal roller using stepped rotating lithography and electroless nickel plating

Hot embossing as a method for the fabrication of polymer high aspect ratio structures

Holger Becker, Ulf Heim · Sensors and Actuators A Physical · 2000 · 664 citations

Engineering, Manufacturing Engineering, Materials Science +10

Roller nanoimprint lithography

Hua Tan, Andrew Gilbertson, Stephen Y. Chou · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1998 · 313 citations

Engineering, Manufacturing Engineering, Materials Science +9

Replication techniques for diffractive optical elements

M. T. Gale · Microelectronic Engineering · 1997 · 171 citations

Natural Sciences, Materials Science, Optical Materials +11

A roller embossing process for rapid fabrication of microlens arrays on glass substrates

C. Y. Chang, Sen‐Yeu Yang, J. L. Sheh · Microsystem Technologies · 2006 · 107 citations

Engineering, Manufacturing Engineering, Materials Science +14

Rapid fabrication of ultraviolet-cured polymer microlens arrays by soft roller stamping process

Chih‐Yuan Chang, Sen‐Yeu Yang, Minghui Chu · Microelectronic Engineering · 2006 · 79 citations

Engineering, Materials Engineering, Materials Science +14