Concepedia

Highly selective KOH-based etchant for boron-doped silicon structures

E. Bassous, Angela C. Lamberti

Microelectronic Engineering · 1989 · 22 citations · 2 references

DOI

Concepts

References

2

(100) Silicon Etch‐Rate Dependence on Boron Concentration in Ethylenediamine‐Pyrocatechol‐Water Solutions

N.F. Raley, Yuichi Sugiyama, T. Van Duzer · Journal of The Electrochemical Society · 1984 · 93 citations

, , +16

The 14th International Conference on Solid-State Sensors and Actuators

Journal of Lightwave Technology · 2006 · 23 citations

, , +14