Applied Physics Letters · 1985 · 71 citations · 3 references
Natural SciencesMaterials EngineeringMaterials ScienceCatalysisElectronic MaterialsSemiconductor MaterialsChemical Vapor DepositionCrystal GrowthLaser PhysicsSemiconductor Crystal GrowthSemiconductor LasersSemiconductor SurfacesAtomic Layer EpitaxyChemical Vapor Deposition MaterialsMetal-organic Chemical Vapor DepositionMetalorganic Chemical Vapor DepositionMetalorganic Vapor Phase EpitaxyPhotochemical Processes
An enhanced crystal growth of GaAs is observed in metalorganic chemical vapor deposition (MOCVD) under laser illumination. It is difficult to understand this enhancement effect only by a pyrolitic effect and we should consider photochemical processes like photoassisted catalytic or surface effect. This laser enhancement makes patterned crystal growth in MOCVD possible.
3