Concepedia

Thermal oxidation of transition metal silicides

Hao Jiang, C. S. Petersson, M.−A. Nicolet

Thin Solid Films · 1986 · 89 citations · 45 references

DOI

Concepts

References

45

General Relationship for the Thermal Oxidation of Silicon

B. E. Deal, Andrew S. Grove · Journal of Applied Physics · 1965 · 3.4K citations

, , +17

Thin Films—Interdiffusion and Reactions

J. M. Poate, K. N. Tu, Jean-Claude Mayor et al. · Journal of The Electrochemical Society · 1979 · 1.7K citations

, , +12

Reaction of thin metal films with SiO2 substrates

R. Pretoriüs, Joel M. Harris, M.−A. Nicolet · Solid-State Electronics · 1978 · 300 citations

, , +12

Thermodynamic considerations in refractory metal-silicon-oxygen systems

R. Beyers · Journal of Applied Physics · 1984 · 243 citations

, , +17

Formation of silicon oxide over gold layers on silicon substrates

Akio Hiraki, E. Lugujjo, J. W. Mayer · Journal of Applied Physics · 1972 · 194 citations · Full text

, , +17