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Materials ScienceLow AngleEngineeringDefect CharacterizationMicrofabricationApplied PhysicsDefect FormationSemiconductor Device FabricationMono-like Silicon IngotsSilicon On InsulatorMicrostructure
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Jean-Claude Labiche, Olivier Mathon, S. Pascarelli et al. · Review of Scientific Instruments · 2007 · 384 citations