Application of 3D gray mask for the fabrication of curved SU-8 structures

Investigation of gray-scale technology for large area 3D silicon MEMS structures

Christopher M. Waits, A. Modafe, Reza Ghodssi · Journal of Micromechanics and Microengineering · 2002 · 151 citations

Engineering, Electrical Engineering, Manufacturing Engineering +17

<title>One-step lithography for mass production of multilevel diffractive optical elements using high-energy beam sensitive (HEBS) gray-level mask</title>

Walter Däschner, Robert Stein, Chuck Wu et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1996 · 30 citations

Engineering, Manufacturing Engineering, Materials Science +16

A novel fabrication technology for smooth 3D inclined polymer microstructures with adjustable angles

Kuo-Yung Hung, Heng-Tsang Hu, Fan‐Gang Tseng · 2004 · 11 citations

Natural Sciences, Materials Engineering, Materials Science +13