2004 · 11 citations · 6 references
Optical MaterialsEngineeringInclined Polymer MicrostructuresAdjustable AnglesMechanical EngineeringMicro-optical ComponentMolding (Process)Computational FabricationSmooth 3DOptical PropertiesGraded-reflectivity MirrorsNanolithography MethodMaterials ScienceSu8 ResistNovel Fabrication TechnologyFabrication TechniqueInclined Uv Exposure3D PrintingDepth-graded Multilayer CoatingMicrofabricationPolymer ScienceApplied PhysicsSurface ScienceDiffractive Optic
A novel technique for the fabrication of three-dimensional microstructures with inclined planes of adjustable angles is proposed. Angles of inclination from 19 to 90 degrees could be easily achieved by an inclined UV exposure on SU8 resist with thickness from 100 to 1000 /spl mu/m. Glycerol is employed as an index matching material during exposure to compensate the refractive index difference between air and SU8, thus extends the possible inclined angles from 54/spl deg/ (in air) down to 19/spl deg/ (in glycerol). 45/spl deg/ inclined mirrors can be easily fabricated by this method. To eliminate reflection induced patterns, CK-6020L resist is employed as an antireflection coating layer and mesa structures with surface of optical quality has also been successfully demonstrated by 5 times exposures in corresponding directions.
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Silicon micromachined hollow microneedles for transdermal liquid transfer
Meint J. de Boer, Y. Yeshurun, M. Hefetz et al. · 2003 · 59 citations
Integrated vertical screen microfilter system using inclined SU-8 structures
Yong‐Kyu Yoon, Jung‐Hwan Park, F. Cros et al. · 2003 · 56 citations