Concepedia

Resistivity of sub-50 nm copper lines epitaxially grown on Si(100) substrate

Pei‐I Wang, M. David Frey, Morris Washington, Saroj K. Nayak, Toh‐Ming Lu

Thin Solid Films · 2012 · 12 citations · 19 references

DOI

Concepts

References

19

The mean free path of electrons in metals

E. H. Sondheimer · Advances In Physics · 1952 · 2.6K citations

, , +14

The conductivity of thin metallic films according to the electron theory of metals

K. Fuchs · Mathematical Proceedings of the Cambridge Philosophical Society · 1938 · 2.3K citations

, , +15

Electrical-Resistivity Model for Polycrystalline Films: the Case of Arbitrary Reflection at External Surfaces

A. F. Mayadas, M. Shatzkes · Physical review. B, Solid state · 1970 · 2.2K citations

, , +17

Size-dependent resistivity of metallic wires in the mesoscopic range

W. Steinhögl, G. Schindler, G. Steinlesberger et al. · Physical review. B, Condensed matter · 2002 · 533 citations

, , +17

Alteration of Cu conductivity in the size effect regime

S. M. Rossnagel, T. S. Kuan · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2004 · 452 citations

, , +17